Electrical Characterization of Anodically Oxidized Ta<sub>2</sub>O<sub>5</sub> Films
نویسندگان
چکیده
منابع مشابه
Electrical characterization of photo - oxidized Si 1 x y Ge x C y films
Strained silicon germanium carbon (Si1 x yGexCy or SiGeC) on silicon was oxidized using a novel photo-oxidation process. The growth rate of the oxide was investigated and found to depend heavily on the germanium and carbon concentrations. MOS capacitors were fabricated with the resulting oxide and electrical characterization was done. The SiGeC MOS capacitors proved to have high leakage current...
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ژورنال
عنوان ژورنال: Electrochemistry
سال: 2004
ISSN: 1344-3542,2186-2451
DOI: 10.5796/electrochemistry.72.737